Abstract: In response to the issue of poor detection performance on wafer surface defect spots and elongated scratches, an improved RT-DETR method for wafer surface defect detection is proposed.
The V-571.Z expands PI’s precision motion portfolio for photonics, semiconductor, optical alignment and metrology ...
Abstract: The core of multi-robot collision avoidance is to guide robots to avoid collisions with other robots and obstacles in a dynamic multi-robot environment, which has recently gained increasing ...